Suomija – Laboratorinė, optinė ir precizinė įranga (išskyrus akinius) – Stylus profilometer

Suomija – Laboratorinė, optinė ir precizinė įranga (išskyrus akinius) – Stylus profilometer

I dalis: Perkančioji organizacija

I.1) Pavadinimas ir adresai:

Oficialus pavadinimas: VTT Technical Research Centre of Finland Ltd
Adresas: P.O. Box 1000, VTT
Miestas: Espoo
Pašto kodas: 02044
Šalis: Suomija
Asmuo ryšiams:
El-paštas: kilpailutus@vtt.fi
Interneto adresas (-ai):
Pagrindinis adresas: https://www.vttresearch.com/fi

II dalis: Objektas

II.1.1) Pavadinimas:

Stylus profilometer
Nuorodos numeris: VTT 44/206/2024

II.1.2) Pagrindinis BVPŽ kodas:

38000000 Laboratorinė, optinė ir precizinė įranga (išskyrus akinius)

II.1.3) Sutarties tipas:

Kita

II.1.4) Trumpas aprašymas:

THE OBJECT OF THE TENDER PROCESS The object of the tender process is a Stylus Profilometer for both 200 mm- and 300 mm wafers. The equipment will be used in VTT's microelectronics cleanroom located in Tekniikantie 17 Espoo Finland (VTT's Micronova center for applied micro and nanotechnology). For further information, see https://www.vttresearch.com/en. The tool must be capable of measuring 200- and 300 mm single side polished (SSP), double side polished (DSP)- and SOI silicon wafers as well as glass and fused silica wafers.  The technical specification of the object of the tender is described in more detail in Annex 1 of this invitation to tender. The equipment must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS The tenderer may offer the following non-mandatory options: Option 1: Pattern Recognition Option 2: Spare stylus with the following tip radiuses: - 50 nm - 2-3 um (standard tip) - 50 um Tenderer may also offer an optional 12-month extra warranty period (added to the mandatory 12 months warranty period) to equipment. VTT does not commit to purchase the extra warranty. The price(s) of the option(s) are not taken into account when comparing tenders.

II.2) Aprašymas:

II.2.1) Kitas (-i) šio pirkimo BVPŽ kodas (-ai):

38000000 Laboratorinė, optinė ir precizinė įranga (išskyrus akinius)